VOC Rotary Concentrator + TOX Treating Semiconductor Fab Emissions
Emissions on a new semiconductor fab line are being treated by a refurbished VOC concentrator system with a new thermal oxidizer
Problem
A leading semiconductor fabricator was expanding and was seeking emission control for their new semiconductor fab process line. They currently utilize several VOC rotary concentrators on their other semiconductor fab lines and were seeking another similarly configured system. Their systems utilized low NOx burners and had features that protected the TOX heat exchangers from build-up of silicone. This silicone build-up occurs as hexamethyl disilazane (HMDS), present in their semiconductor fab emissions, solidifies as it is combusted in their thermal oxidizers. They desired a system with these features and would meet California VOC emission and NOx emission standards.
Photos: In Progess
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Solution
Kono Kogs proposed the pairing of a refurbished VOC concentrator system with a custom thermal oxidizer.
The VOC concentrator system available from Kono Kogs was a never used system. It was configured with zeolite adsorption material designed specifically for semiconductor fabrication. The existing catalytic oxidizer which was part of the original VOC concentrator system was removed and replaced with a custom designed & built recuperative thermal oxidizer. The custom oxidizer included a special shell and tube heat exchanger design for ease of cleaning. The oxidizer airflow path was designed for silicone "capture and control" that reduced and collected silicone (HMDS) build up. The capture system was strategically positioned prior to the hot side of the heat exchanger, where build-up occurs in semiconductor applications.
A low NOx burner system was provided to meet California's strict NOx emission standards.
Also, redundancy was provided by a integrating a bypass option in the event the VOC concentrator is down for scheduled/unscheduled maintenance. The bypass system included logic, bypass fans, and dampers to direct semiconductor fab emissions to the customer's back-up carbon bed.
Photos: After
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Equipment & Services Provided
- Fully refurbished Munters VOC Rotary Concentrator
- Zeolite wheel designed for semiconductor emissions
- Custom thermal oxidizer as final VOC treatment
- Replaces original catalytic unit
- Cleanable heat exchanger added to handle HMDS
- Low NOx burner added for California compliance
- Dual purge fan addition for redundancy
- Bypass logic, fans, dampers for back up carbon filters
- New PLC and MMI
- Parts Warranty & VOC destruction warranty
Emission control specialists... so you don't have to be
Kono Kogs – A Proven Solution Provider for Emission Control Projects
VOC concentrator technology can be the ideal emission control system for niche applications. Where they can be applied they offer significant utility savings and high VOC destruction/capture. For more information on these systems see: What is a VOC Concentrator? and Custom VOC Concentrators for more details.
Our team of industrial oxidizer experts handle everything related to regenerative thermal oxidizers, VOC concentrators, and thermal oxidizers, including emergency services, field repairs, field rebuilds/upgrades, preventive maintenance service, relocation, trade-in, and replacement with our refurbished, warrantied long-life RTO systems. We have hundreds of refurbished oxidizer units installed worldwide. Contact us to learn more about refurbished oxidizers to satisfy your processes' VOC abatement requirements.
